School of Mechanical, Materials and Mechatronic Engineering
SEMINAR Development of multi-scale process technology for fabrication of micro devices for bio- and medical applications
PRESENTER Prof. Ming YANG WHERE SMART6.209 DATE Friday, 4th of March 2016 TIME 11.30 -12.30
ABSTRACT The micro devices, well known by MEMS (Micro Mechanical Electro system), have spread their application from the field of physical sensors and actuators to fields of bio-analysis, medical equipment and fuel cells. Fabrication of the micro devices with various materials and processes are necessary to meet the specification for these applications. In the study, we applied micro metal forming, transferring, surface treatment, self-organization processing technologies and their combinations for fabrication of micro devices in comparison with the conventional technology by using semiconductor material processing. Several fabrication technologies will be introduced in this lecture. Combination of nanoimprinting and press-forming processes of polymer thin foil was applied to fabricate micro 3D structure for high sensitive and rapid immunoassay, such as ELISA. Combination of thin foil metal forming and CVD processes was developed to fabrication of micro 3D structure with surface treatment. Furthermore, combination of synthesis of ZnO nano-rod and transferring processes was applied to fabrication of bio-sensors.
ABOUT THE SPEAKER Prof. YANG is a Professor of Tokyo Metropolitan University, received his B.Eng., M.Eng. and Dr.Eng. in mechanical engineering from Kyoto University, JAPAN in 1984, 1986 and 1990, respectively. He used to work on intelligent control system for press-brake machine at Research and Development Laboratory of AMADA Co. From 1991, he moved to Tokyo Metropolitan University and worked on intelligent metal forming system and from 1998 he became a staff member of the Laboratory of Precision Measurement and Instrumentation and worked on MEMS fabrication and evaluation.
Prof. YANG interests in fabrication of micro devices with semiconductors, polymers and metals, and application of MEMS to chemical and biological analysis. He works on development of intelligent micro instruments, such as micro gas sensors, micro testing probe with actuators, and application of Bio-MEMS for health monitoring and infectious deiseases detection. He also works on micro metal forming, precision process of sheet metal, micro die fabrication and characterization of thin metal films.
Prof. YANG is member of JMSE, JSTP, JSPE, JLME, ISCIE. He received the Young Researcher Award of JSTP in 1992; Best Chemical analysis Award in 2000; Amada Metal forming Award in 2003; and Aida Award of JST in 2004.?
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